Nrog cov thev naus laus zis zoo tshaj plaws thiab cov chaw, kev tswj hwm zoo nruj, tus nqi tsim nyog, tus neeg muab kev pabcuam zoo tshaj plaws thiab kev koom tes ze nrog cov neeg siv khoom, peb tau mob siab rau kev xa cov txiaj ntsig zoo tshaj plaws rau peb cov neeg yuav khoom rau Kev Muag Khoom Kub rau Carbon Tetrafluoride / Tetrafluoromethane CF4 Gas 99.999% Purity Electronic Grade rau Semiconductor, Lub hom phiaj tseem ceeb ntawm peb lub tuam txhab yuav yog ua lub cim xeeb zoo rau txhua tus neeg yuav khoom, thiab tsim kom muaj kev sib raug zoo ntev nrog cov neeg siv khoom thiab cov neeg siv thoob plaws ntiaj teb.
Nrog cov thev naus laus zis zoo tshaj plaws thiab cov chaw, kev tswj hwm zoo nruj, tus nqi tsim nyog, tus neeg muab kev pabcuam zoo tshaj plaws thiab kev koom tes zoo nrog cov neeg siv khoom, peb tau mob siab rau kev xa cov txiaj ntsig zoo tshaj plaws rau peb cov neeg yuav khoom rauTuam Tshoj CF4 thiab CF4 Roj, Peb tsom mus rau kev muab kev pabcuam rau peb cov neeg siv khoom ua lub hauv paus tseem ceeb hauv kev txhawb nqa peb txoj kev sib raug zoo mus sij hawm ntev. Peb qhov muaj cov khoom zoo tas mus li ua ke nrog peb qhov kev pabcuam ua ntej muag thiab tom qab muag zoo heev ua kom muaj kev sib tw zoo hauv kev lag luam thoob ntiaj teb. Peb txaus siab koom tes nrog cov phooj ywg ua lag luam los ntawm tsev thiab txawv teb chaws thiab tsim lub neej yav tom ntej zoo ua ke.
| Cov Lus Qhia Tshwj Xeeb | 99.999% |
| Pa + Argon | ≤1ppm |
| Nitrogen | ≤4 ppm |
| Dej (H2O) | ≤3 ppm |
| HF | ≤0.1 ppm |
| CO | ≤0.1 ppm |
| CO2 | ≤1 ppm |
| SF6 | ≤1 ppm |
| Halocarbynes | ≤1 ppm |
| Tag Nrho Cov Khoom Tsis Huv | ≤10 ppm |
Carbon tetrafluoride yog ib qho halogenated hydrocarbon nrog cov tshuaj formula CF4. Nws tuaj yeem suav tias yog halogenated hydrocarbon, halogenated methane, perfluorocarbon, lossis ua ib qho inorganic compound. Carbon tetrafluoride yog ib qho roj tsis muaj xim thiab tsis muaj ntxhiab, tsis yaj hauv dej, yaj hauv benzene thiab chloroform. Ruaj khov nyob rau hauv qhov kub thiab txias ib txwm muaj, zam cov oxidants muaj zog, cov khoom siv hluav taws xob lossis cov khoom siv hluav taws xob. Cov roj tsis kub hnyiab, lub siab sab hauv ntawm lub thawv yuav nce ntxiv thaum raug cua sov siab, thiab muaj kev phom sij ntawm kev tawg thiab tawg. Nws ruaj khov hauv tshuaj lom neeg thiab tsis kub hnyiab. Tsuas yog cov kua ammonia-sodium hlau reagent tuaj yeem ua haujlwm ntawm chav tsev kub. Carbon tetrafluoride yog ib qho roj uas ua rau muaj qhov cuam tshuam ntawm lub tsev cog khoom. Nws ruaj khov heev, tuaj yeem nyob hauv huab cua ntev, thiab yog ib qho roj tsev cog khoom muaj zog heev. Carbon tetrafluoride siv rau hauv cov txheej txheem plasma etching ntawm ntau yam kev sib xyaw ua ke. Nws kuj tseem siv ua cov roj laser, thiab siv rau hauv cov tub yees txias qis, cov kuab tshuaj, cov roj nplua nyeem, cov ntaub ntawv rwb thaiv tsev, thiab cov khoom siv txias rau cov khoom siv infrared detectors. Nws yog cov roj plasma etching uas siv ntau tshaj plaws hauv kev lag luam microelectronics. Nws yog cov roj tetrafluoromethane high-purity thiab tetrafluoromethane high-purity thiab cov pa oxygen high-purity. Nws tuaj yeem siv dav hauv silicon, silicon dioxide, silicon nitride, thiab phosphosilicate iav. Kev etching ntawm cov ntaub ntawv zaj duab xis nyias xws li tungsten thiab tungsten kuj tseem siv dav hauv kev ntxuav qhov chaw ntawm cov khoom siv hluav taws xob, kev tsim cov roj teeb hnub ci, kev siv tshuab laser, kev txias txias qis, kev tshuaj xyuas qhov xau, thiab cov tshuaj ntxuav hauv kev tsim cov ntawv luam tawm. Siv ua cov tub yees txias qis thiab cov tshuab plasma qhuav etching rau cov circuits sib xyaw. Kev ceev faj rau kev khaws cia: Khaws cia rau hauv qhov chaw txias, cua nkag tsis tau roj. Khaws cia kom deb ntawm hluav taws thiab cua sov. Qhov kub cia yuav tsum tsis pub tshaj 30 ° C. Nws yuav tsum khaws cia cais ntawm cov khoom yooj yim (combustible) thiab oxidants, thiab zam kev khaws cia sib xyaw. Thaj chaw khaws cia yuav tsum tau nruab nrog cov khoom siv kho mob thaum muaj xwm txheej ceev.
① Cov tub yees:
Tetrafluoromethane qee zaum siv ua cov tub yees txias uas kub tsawg.
② Kev txiav:
Nws yog siv rau hauv cov khoom siv hluav taws xob microfabrication ib leeg lossis ua ke nrog oxygen ua cov plasma etchant rau silicon, silicon dioxide, thiab silicon nitride.
| Khoom | Cov pa roj carbon Tetrafluoride CF4 | ||
| Qhov Loj ntawm Pob Khoom | Lub tog raj kheej 40Ltr | Lub tog raj kheej 50Ltr | |
| Sau Qhov Hnyav Tag Nrho / Lub tog raj kheej | 30Kgs | 38Kgs | |
| QTY Loaded hauv 20'Container | 250 Lub Cyl | 250 Lub Cyl | |
| Tag Nrho Qhov Hnyav | 7.5 Tons | 9.5 Tons | |
| Lub tog raj kheej Tare Luj | 50Kgs | 55Kgs | |
| Lub qhov dej | CGA 580 | ||
①High purity, qhov chaw tshiab;
② ISO daim ntawv pov thawj chaw tsim khoom;
③ Kev xa khoom sai;
④ Kev tshuaj xyuas online rau kev tswj xyuas zoo hauv txhua kauj ruam;
⑤Qhov yuav tsum tau ua thiab ua tib zoo saib xyuas kev tuav lub tog raj kheej ua ntej sau;Nrog cov thev naus laus zis zoo tshaj plaws thiab cov chaw, kev tswj hwm zoo nruj, tus nqi tsim nyog, tus neeg muab kev pabcuam zoo tshaj plaws thiab kev koom tes ze nrog cov neeg siv khoom, peb tau mob siab rau kev xa cov txiaj ntsig zoo tshaj plaws rau peb cov neeg yuav khoom rau Kev Muag Khoom Kub rau Carbon Tetrafluoride / Tetrafluoromethane CF4 Gas 99.999% Purity Electronic Grade rau Semiconductor, Lub hom phiaj tseem ceeb ntawm peb lub tuam txhab yuav yog ua lub cim xeeb zoo rau txhua tus neeg yuav khoom, thiab tsim kom muaj kev sib raug zoo ntev nrog cov neeg siv khoom thiab cov neeg siv thoob plaws ntiaj teb.
Muag Kub rauTuam Tshoj CF4 thiab CF4 Roj, Peb tsom mus rau kev muab kev pabcuam rau peb cov neeg siv khoom ua lub hauv paus tseem ceeb hauv kev txhawb nqa peb txoj kev sib raug zoo mus sij hawm ntev. Peb qhov muaj cov khoom zoo tas mus li ua ke nrog peb qhov kev pabcuam ua ntej muag thiab tom qab muag zoo heev ua kom muaj kev sib tw zoo hauv kev lag luam thoob ntiaj teb. Peb txaus siab koom tes nrog cov phooj ywg ua lag luam los ntawm tsev thiab txawv teb chaws thiab tsim lub neej yav tom ntej zoo ua ke.