Kub muag Tuam Tshoj High Purity Carbon Tetrafluoride CF4 roj rau semiconductor kev lag luam etching

Cov lus piav qhia luv luv:


Khoom Qhia Qhia

Khoom Ntawv

Peb tsis tu ncua ua peb tus ntsuj plig ntawm "kev tsim kho kev ua haujlwm zoo nkauj, peb sov siab txais kev lag luam rau cov neeg siv khoom noj kom tua tau thiab tsim kom muaj ntsej muag zoo nkauj thiab ua kom muaj kev sib koom tes ntau dua thiab zoo nkauj tag kis.
Peb tsis tu ncua ua peb tus ntsuj plig ntawm "kev tsim kho tshiab coj los ua kev nce qib, kev tswj hwm kev ua lag luam, cov qhab nia ua lag luam nyiam cov neeg siv khoom rauTuam Tshoj Cf4 Lub Tub Yees, Roj fais fab, Peb yog koj tus khub txhim khu kev qha nyob rau hauv kev lag luam thoob ntiaj teb nrog cov khoom zoo tshaj plaws. Peb cov txiaj ntsig yog qhov tsim kho tshiab, hloov tau yooj yim thiab kev ntseeg tau uas tau tsim thaum muaj nees nkaum xyoo dhau los. Peb tsom rau muab kev pab rau peb cov neeg siv khoom tseem ceeb hauv kev ntxiv dag zog rau peb cov kev sib raug zoo ntev. Peb cov kev pab kawm qib siab txuas ntxiv nrog peb cov kev muag khoom ua ntej thiab tom qab muag ua kom muaj kev sib tw muaj zog hauv kev ua lag luam muaj zog.

Kev tsis muaj

Kev qhia tshwj xeeb 99.999%
Oxygen + Argon ≤1PPM
Nitrogen ≤4 ppm
Ya raws (H2O) ≤3 PPM
HF I≤0.1 PPM
CO I≤0.1 PPM
CO2 ≤1 PPM
SF6 ≤1 PPM
Halocarbynes ≤1 PPM
Tag nrho cov impurities ≤10 ppm

Cov pa roj carbon Tetraflluoride yog halogenated hydrocarbon nrog tshuaj chemical cf4. Nws tuaj yeem suav tias yog halogenated hydrocarbon, halogenated Methane, Perfluorocarbon, lossis raws li cov inorganic compound. Cov pa roj carbon tetraflide yog cov pa roj tsis muaj kob thiab tsis muaj ntxhiab, insoluble hauv dej, soluble hauv benzene thiab chloroform. Ruaj khov nyob rau hauv qhov kub thiab txias thiab lub siab, zam kom tsis txhob muaj cov neeg oxidants muaj zog, cov khoom tawg lossis cov khoom sib txuas. Cov roj tsis sib xyaw, cov twj siab sab hauv, lub zog sab hauv yuav nce ntxiv thaum raug cov phom sij, thiab muaj kev phom sij ntawm kev tawg thiab tawg. Nws yog tshuaj tsis ruaj khov thiab tsis yog-taws. Tsuas yog kua ammonia-sodium hlau reagent tuaj yeem ua haujlwm ntawm chav sov. Cov pa roj carbon Tetraflluoride yog cov pa roj uas ua rau lub tsev cog khoom nyhuv. Nws yog ruaj khov, tuaj yeem nyob twj ywm hauv cov huab cua ntev, thiab yog lub tsev cog khoom muaj zog heev roj. Cov pa roj carbon Tetrafllubles yog siv nyob rau hauv lub plasma etching txheej txheem ntawm ntau yam kev sib xyaw ua ke. Nws kuj yog siv los ua cov roj laser, thiab siv hauv cov khoom siv tsawg, cov kuab tshuaj, lubricants, cov khoom siv tshuaj insulating, thiab txias rau infrared detectors. Nws yog qhov ntshav uas siv tshaj plaws etching roj nyob rau hauv microelectronics kev lag luam. Nws yog kev sib xyaw ntawm Tetrarafluoromethane siab-huv roj thiab tetrafluoromethane siab thiab siab purity oxygen. Nws tuaj yeem yog siv dav hauv silicon, silicon dioxide, sioson nitride, thiab phosphosilicate iav. Qhov etching ntawm nyias zaj duab xis cov ntaub ntawv xws li tungsten thiab tungsten tseem dav siv nyob rau hauv cov khoom siv hluav taws xob, lub hnub ci tsawg tshuaj, thiab xab npum hauv cov luam tawm hluav taws xob. Siv raws li cov tub yees tsawg-txias thiab ntshav qhuav etching technology rau kev sib xyaw ua ke. Xyuam xim rau cia: Muab cia rau hauv qhov chaw txias, qhov cua tsis-compressible Gas Warehouse. Tseg deb ntawm hluav taws thiab cov khoom cua sov. Qhov kub yuav tsum tsis pub tshaj 30 ° C. Nws yuav tsum tau muab cais tawm los ntawm yooj yim (combustible) combustibles thiab oxidants, thiab zam kev sib xyaw. Cov chaw cia khoom yuav tsum tau nruab nrog cov khoom siv thaum muaj xwm ceev.

Daim Ntawv Thov:

Lub tub yees:

TetraTruorongethans qee zaum siv los ua cov tub yees tsawg.

  tso tseg Greg

② etching:

Nws yog siv rau hauv electronics microugrabrication me lossis hauv kev sib xyaw ua ke nrog oxygen zoo li lub plasma etchant rau silicon, silicon dioxide, thiab silicon nitride.

dsgre rgg

Pob khoom ib txwm:

Khoom Carbon Tetrafruoride CF4
Ntim Qhov Coob 40ltr lub tog raj kheej 50ltr KHEEJ KHEEJ  
Filling net nyhav / cyl 30kgs 38kgs  
Qty loaded hauv 20'Conainer 250 cyls 250 cyls
Tag Nrho Net Nyhav 7.5 Tons 9.5 Tons
Lub tog raj kheej tare hnyav 50kgs 55kgs
Ib lub dab tsi uas qhib thiab kaw CGA 580

Hom tau zoo:

①high purity, qhov chaw kawg;

②Iso cov chaw muag khoom muaj npe;

③Fast Kev Xa;

④on-line-lic-kab System rau kev tswj hwm kom zoo nyob rau txhua kauj ruam;

⑤high xav tau thiab cov txheej txheem meticulous rau tuav lub tog raj kheej ua ntej sau;Peb tsis tu ncua ua peb tus ntsuj plig ntawm "kev tsim kho kev ua haujlwm zoo nkauj, peb sov siab txais kev lag luam rau cov neeg siv khoom noj kom tua tau thiab tsim kom muaj ntsej muag zoo nkauj thiab ua kom muaj kev sib koom tes ntau dua thiab zoo nkauj tag kis.
Kub muagTuam Tshoj Cf4 Lub Tub Yees, Roj fais fab, Peb yog koj tus khub txhim khu kev qha nyob rau hauv kev lag luam thoob ntiaj teb nrog cov khoom zoo tshaj plaws. Peb cov txiaj ntsig yog qhov tsim kho tshiab, hloov tau yooj yim thiab kev ntseeg tau uas tau tsim thaum muaj nees nkaum xyoo dhau los. Peb tsom rau muab kev pab rau peb cov neeg siv khoom tseem ceeb hauv kev ntxiv dag zog rau peb cov kev sib raug zoo ntev. Peb cov kev pab kawm qib siab txuas ntxiv nrog peb cov kev muag khoom ua ntej thiab tom qab muag ua kom muaj kev sib tw muaj zog hauv kev ua lag luam muaj zog.


  • Yav dhau los:
  • Tom ntej:

  • Sau koj cov lus ntawm no thiab xa mus rau peb