Kub-muag Tuam Tshoj High Purity Carbon Tetrafluoride CF4 Gas rau Semiconductor Kev Lag Luam Etching

Kev Piav Qhia Luv:


Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

Peb ib txwm ua peb tus ntsuj plig ntawm "Kev tsim kho tshiab coj kev vam meej, Kev ua kom zoo tshaj plaws, Kev tswj hwm kev lag luam zoo, Qhab nia nyiam cov neeg siv khoom rau Kub-muag Tuam Tshoj High Purity Carbon Tetrafluoride CF4 Gas rau Semiconductor Kev Lag Luam Etching, Peb sov siab txais tos cov phooj ywg los ntawm txhua qhov chaw ntawm lub neej los nrhiav kev koom tes thiab tsim kom muaj kev ci ntsa iab thiab zoo nkauj dua tag kis.
Peb ib txwm ua peb lub siab ntawm "Kev Tsim Kho Tshiab coj kev vam meej, Kev ua tau zoo ua kom muaj kev noj nyob zoo, Kev tswj hwm kev lag luam zoo, Qhab nia qiv nyiaj nyiam cov neeg siv khoom rauTuam Tshoj CF4 Refrigerant Gas, Lub tog raj kheej roj, Peb yog koj tus khub txhim khu kev qha hauv kev lag luam thoob ntiaj teb nrog cov khoom zoo tshaj plaws. Peb qhov zoo yog kev tsim kho tshiab, kev ywj pheej thiab kev ntseeg siab uas tau tsim tsa thaum nees nkaum xyoo dhau los. Peb tsom mus rau kev muab kev pabcuam rau peb cov neeg siv khoom ua lub hauv paus tseem ceeb hauv kev txhawb nqa peb txoj kev sib raug zoo mus sij hawm ntev. Peb qhov muaj cov kev daws teeb meem zoo tas mus li ua ke nrog peb cov kev pabcuam ua ntej muag thiab tom qab muag zoo heev ua kom muaj kev sib tw zoo hauv kev lag luam thoob ntiaj teb.

Cov Kev Ntsuas Kev Txawj

Cov Lus Qhia Tshwj Xeeb 99.999%
Pa + Argon ≤1ppm
Nitrogen ≤4 ppm
Dej (H2O) ≤3 ppm
HF ≤0.1 ppm
CO ≤0.1 ppm
CO2 ≤1 ppm
SF6 ≤1 ppm
Halocarbynes ≤1 ppm
Tag Nrho Cov Khoom Tsis Huv ≤10 ppm

Carbon tetrafluoride yog ib qho halogenated hydrocarbon nrog cov tshuaj formula CF4. Nws tuaj yeem suav tias yog halogenated hydrocarbon, halogenated methane, perfluorocarbon, lossis ua ib qho inorganic compound. Carbon tetrafluoride yog ib qho roj tsis muaj xim thiab tsis muaj ntxhiab, tsis yaj hauv dej, yaj hauv benzene thiab chloroform. Ruaj khov nyob rau hauv qhov kub thiab txias ib txwm muaj, zam cov oxidants muaj zog, cov khoom siv hluav taws xob lossis cov khoom siv hluav taws xob. Cov roj tsis kub hnyiab, lub siab sab hauv ntawm lub thawv yuav nce ntxiv thaum raug cua sov siab, thiab muaj kev phom sij ntawm kev tawg thiab tawg. Nws ruaj khov hauv tshuaj lom neeg thiab tsis kub hnyiab. Tsuas yog cov kua ammonia-sodium hlau reagent tuaj yeem ua haujlwm ntawm chav tsev kub. Carbon tetrafluoride yog ib qho roj uas ua rau muaj qhov cuam tshuam ntawm lub tsev cog khoom. Nws ruaj khov heev, tuaj yeem nyob hauv huab cua ntev, thiab yog ib qho roj tsev cog khoom muaj zog heev. Carbon tetrafluoride siv rau hauv cov txheej txheem plasma etching ntawm ntau yam kev sib xyaw ua ke. Nws kuj tseem siv ua cov roj laser, thiab siv rau hauv cov tub yees txias qis, cov kuab tshuaj, cov roj nplua nyeem, cov ntaub ntawv rwb thaiv tsev, thiab cov khoom siv txias rau cov khoom siv infrared detectors. Nws yog cov roj plasma etching uas siv ntau tshaj plaws hauv kev lag luam microelectronics. Nws yog cov roj tetrafluoromethane high-purity thiab tetrafluoromethane high-purity thiab cov pa oxygen high-purity. Nws tuaj yeem siv dav hauv silicon, silicon dioxide, silicon nitride, thiab phosphosilicate iav. Kev etching ntawm cov ntaub ntawv zaj duab xis nyias xws li tungsten thiab tungsten kuj tseem siv dav hauv kev ntxuav qhov chaw ntawm cov khoom siv hluav taws xob, kev tsim cov roj teeb hnub ci, kev siv tshuab laser, kev txias txias qis, kev tshuaj xyuas qhov xau, thiab cov tshuaj ntxuav hauv kev tsim cov ntawv luam tawm. Siv ua cov tub yees txias qis thiab cov tshuab plasma qhuav etching rau cov circuits sib xyaw. Kev ceev faj rau kev khaws cia: Khaws cia rau hauv qhov chaw txias, cua nkag tsis tau roj. Khaws cia kom deb ntawm hluav taws thiab cua sov. Qhov kub cia yuav tsum tsis pub tshaj 30 ° C. Nws yuav tsum khaws cia cais ntawm cov khoom yooj yim (combustible) thiab oxidants, thiab zam kev khaws cia sib xyaw. Thaj chaw khaws cia yuav tsum tau nruab nrog cov khoom siv kho mob thaum muaj xwm txheej ceev.

Daim Ntawv Thov:

① Cov tub yees:

Tetrafluoromethane qee zaum siv ua cov tub yees txias uas kub tsawg.

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② Kev txiav:

Nws yog siv rau hauv cov khoom siv hluav taws xob microfabrication ib leeg lossis ua ke nrog oxygen ua cov plasma etchant rau silicon, silicon dioxide, thiab silicon nitride.

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Pob khoom ib txwm muaj:

Khoom Cov pa roj carbon Tetrafluoride CF4
Qhov Loj ntawm Pob Khoom Lub tog raj kheej 40Ltr Lub tog raj kheej 50Ltr  
Sau Qhov Hnyav Tag Nrho / Lub tog raj kheej 30Kgs 38Kgs  
QTY Loaded hauv 20'Container 250 Lub Cyl 250 Lub Cyl
Tag Nrho Qhov Hnyav 7.5 Tons 9.5 Tons
Lub tog raj kheej Tare Luj 50Kgs 55Kgs
Lub qhov dej CGA 580

Qhov Zoo:

①High purity, qhov chaw tshiab;

② ISO daim ntawv pov thawj chaw tsim khoom;

③ Kev xa khoom sai;

④ Kev tshuaj xyuas online rau kev tswj xyuas zoo hauv txhua kauj ruam;

⑤Qhov yuav tsum tau ua thiab ua tib zoo saib xyuas kev tuav lub tog raj kheej ua ntej sau;Peb ib txwm ua peb tus ntsuj plig ntawm "Kev tsim kho tshiab coj kev vam meej, Kev ua kom zoo tshaj plaws, Kev tswj hwm kev lag luam zoo, Qhab nia nyiam cov neeg siv khoom rau Kub-muag Tuam Tshoj High Purity Carbon Tetrafluoride CF4 Gas rau Semiconductor Kev Lag Luam Etching, Peb sov siab txais tos cov phooj ywg los ntawm txhua qhov chaw ntawm lub neej los nrhiav kev koom tes thiab tsim kom muaj kev ci ntsa iab thiab zoo nkauj dua tag kis.
Muag kubTuam Tshoj CF4 Refrigerant Gas, Lub tog raj kheej roj, Peb yog koj tus khub txhim khu kev qha hauv kev lag luam thoob ntiaj teb nrog cov khoom zoo tshaj plaws. Peb qhov zoo yog kev tsim kho tshiab, kev ywj pheej thiab kev ntseeg siab uas tau tsim tsa thaum nees nkaum xyoo dhau los. Peb tsom mus rau kev muab kev pabcuam rau peb cov neeg siv khoom ua lub hauv paus tseem ceeb hauv kev txhawb nqa peb txoj kev sib raug zoo mus sij hawm ntev. Peb qhov muaj cov kev daws teeb meem zoo tas mus li ua ke nrog peb cov kev pabcuam ua ntej muag thiab tom qab muag zoo heev ua kom muaj kev sib tw zoo hauv kev lag luam thoob ntiaj teb.


  • Yav dhau los:
  • Tom ntej no:

  • Sau koj cov lus ntawm no thiab xa tuaj rau peb