Boron Trichhloride (BCl3)yog ib qho inorganic compound feem ntau siv nyob rau hauv qhuav etching thiab tshuaj lom neeg vapor deposition (CVD) cov txheej txheem hauv kev tsim khoom. Nws yog cov roj tsis muaj xim nrog cov ntxhiab tsw phem ntawm chav tsev kub thiab muaj kev nkag siab los ua cov roj ntsha thiab cov roj acid.

Cov ntawv thov ntawm Boron trichhloride

Hauv kev lag luam semiconduct,Boron TrichhlorideFeem ntau yog siv rau qhuav etching ntawm txhuas thiab raws li dopant los ua p-hom thaj tsam ntawm silicon wafers. Nws kuj tseem siv tau rau Etch cov ntaub ntawv xws li Gaas, si, aln, thiab raws li ib qho chaw nyob hauv qee cov ntawv thov tshwj xeeb. Ib qho ntxiv, Boron Trichloride yog dav siv nyob rau hauv kev ua hlau, kev lag luam iav, tshuaj ntsuam xyuas tshuaj lom neeg tshuaj lom neeg thiab kuaj xyuas.

Kev Nyab Xeeb ntawm Boron Trichhloride

Boron Trichhlorideyog corrosive thiab lom thiab tuaj yeem ua rau kev puas tsuaj loj rau lub qhov muag thiab tawv nqaij. Nws hydrolyzes nyob rau hauv cov huab cua noo kom tso cov tshuaj lom hydrogen ydrogen chloride. Yog li ntawd, kev ntsuas kev nyab xeeb yuav tsum tau coj thaum tuavBoron Trichhloride, suav nrog hnav cov khaub ncaws tiv thaiv, googgles thiab ua pa tiv thaiv cov khoom siv, thiab kev ua haujlwm hauv qhov chaw muaj pa zoo.