Boron trichloride (BCl3)yog ib qho inorganic compound feem ntau siv nyob rau hauv qhuav etching thiab tshuaj vapor deposition (CVD) txheej txheem nyob rau hauv semiconductor manufacturing. Nws yog cov roj tsis muaj xim nrog cov ntxhiab tsw ntxhiab tsw ntawm chav tsev kub thiab yog qhov nkag siab rau huab cua vim nws hydrolyzes los tsim hydrochloric acid thiab boric acid.

Kev siv ntawm Boron Trichloride

Hauv kev lag luam semiconductor,Boron trichlorideFeem ntau yog siv rau qhuav etching ntawm txhuas thiab raws li ib tug dopant rau P-hom cheeb tsam ntawm silicon wafers. Nws kuj tseem tuaj yeem siv los ua cov ntaub ntawv xws li GaAs, Si, AlN, thiab ua cov khoom siv boron hauv qee cov ntawv thov tshwj xeeb. Tsis tas li ntawd, Boron trichloride yog dav siv hauv kev ua hlau, iav kev lag luam, tshuaj ntsuam xyuas thiab kev tshawb fawb hauv chav kuaj.

Kev nyab xeeb ntawm Boron Trichloride

Boron trichlorideyog corrosive thiab lom thiab tuaj yeem ua rau muaj kev puas tsuaj loj rau lub qhov muag thiab tawv nqaij. Nws hydrolyzes hauv huab cua ntub kom tso cov pa phem hydrogen chloride. Yog li ntawd, kev ntsuas kev nyab xeeb tsim nyog yuav tsum tau ua thaum tuavBoron trichloride, suav nrog hnav khaub ncaws tiv thaiv, tsom iav thiab cov khoom tiv thaiv ua pa, thiab ua haujlwm hauv qhov chaw muaj cua zoo.