Laser roj

Laser roj yog tsuas yog siv rau laser annealing thiab lithography roj nyob rau hauv electronics kev lag luam. Tau txais txiaj ntsig los ntawm kev tsim kho tshiab ntawm cov ntxaij vab tshaus xov tooj ntawm tes thiab kev nthuav dav ntawm thaj chaw thov, qhov ntsuas ntawm cov khoom lag luam polysilicon kub qis yuav nthuav dav ntxiv, thiab cov txheej txheem laser annealing tau txhim kho kev ua tau zoo ntawm TFTs. Ntawm cov neon, fluorine, thiab argon gases siv nyob rau hauv ArF excimer laser rau manufacturing semiconductors, neon account rau ntau tshaj 96% ntawm cov roj laser sib tov. Nrog rau kev ua kom zoo ntawm cov tshuab semiconductor, kev siv cov excimer lasers tau nce, thiab kev qhia txog kev siv tshuab ob npaug tau ua rau muaj kev xav tau ntau ntxiv rau cov roj neon siv los ntawm ArF excimer lasers. Tau txais txiaj ntsig los ntawm kev txhawb nqa hauv zos ntawm cov khoom siv hluav taws xob tshwj xeeb, cov tuam txhab tsim khoom lag luam yuav muaj qhov chaw lag luam loj hlob zoo dua yav tom ntej.

Lithography tshuab yog cov khoom siv tseem ceeb ntawm kev tsim khoom semiconductor. Lithography txhais qhov loj ntawm transistors. Kev sib koom ua ke ntawm txoj kev lag luam lithography yog tus yuam sij rau kev tawg ntawm lithography tshuab. Cov khoom siv semiconductor sib xws xws li photoresist, photolithography gas, photomask, thiab txheej thiab tsim cov cuab yeej muaj cov ntsiab lus thev naus laus zis. Lithography Gas yog cov roj uas lub tshuab lithography tsim kom tob tob ultraviolet laser. Cov roj lithography sib txawv tuaj yeem tsim cov teeb pom kev sib txawv ntawm cov wavelengths sib txawv, thiab lawv cov wavelength ncaj qha cuam tshuam rau kev daws teeb meem ntawm lub tshuab lithography, uas yog ib qho ntawm cov cores ntawm lub tshuab lithography. Nyob rau hauv 2020, tag nrho cov thoob ntiaj teb kev muag khoom ntawm lithography tshuab yuav yog 413 units, ntawm uas ASML muag 258 units accounted rau 62%, Canon muag 122 units accounted rau 30%, thiab Nikon muag 33 units suav txog 8%.