Roj laser

Cov roj laser feem ntau yog siv rau laser annealing thiab lithography roj hauv kev lag luam hluav taws xob. Tau txais txiaj ntsig los ntawm kev tsim kho tshiab ntawm cov ntxaij vab tshaus xov tooj ntawm tes thiab kev nthuav dav ntawm thaj chaw thov, qhov ntsuas ntawm kev lag luam polysilicon kub qis yuav raug nthuav dav ntxiv, thiab cov txheej txheem laser annealing tau txhim kho qhov kev ua tau zoo ntawm TFTs. Ntawm cov neon, fluorine, thiab argon roj siv hauv ArF excimer laser rau kev tsim cov semiconductors, neon suav rau ntau dua 96% ntawm cov roj laser sib xyaw. Nrog kev txhim kho ntawm cov thev naus laus zis semiconductor, kev siv excimer lasers tau nce ntxiv, thiab kev qhia txog kev siv tshuab ob npaug tau ua rau muaj kev nce ntxiv ntawm qhov kev thov rau cov roj neon siv los ntawm ArF excimer lasers. Tau txais txiaj ntsig los ntawm kev txhawb nqa ntawm qhov chaw ntawm cov roj hluav taws xob tshwj xeeb, cov chaw tsim khoom hauv tsev yuav muaj qhov chaw loj hlob zoo dua yav tom ntej.

Lub tshuab lithography yog cov khoom siv tseem ceeb ntawm kev tsim khoom semiconductor. Lithography txhais qhov loj ntawm cov transistors. Kev txhim kho sib koom tes ntawm cov saw hlau lithography kev lag luam yog qhov tseem ceeb rau kev tawg ntawm lub tshuab lithography. Cov khoom siv semiconductor sib xws xws li photoresist, photolithography gas, photomask, thiab txheej thiab tsim cov khoom siv muaj cov ntsiab lus thev naus laus zis siab. Lithography gas yog cov roj uas lub tshuab lithography tsim cov laser ultraviolet tob. Cov roj lithography sib txawv tuaj yeem tsim cov teeb pom kev ntawm cov wavelengths sib txawv, thiab lawv cov wavelength cuam tshuam ncaj qha rau qhov kev daws teeb meem ntawm lub tshuab lithography, uas yog ib qho ntawm cov tub ntxhais ntawm lub tshuab lithography. Xyoo 2020, tag nrho cov muag khoom thoob ntiaj teb ntawm cov tshuab lithography yuav yog 413 units, uas ASML muag 258 units suav rau 62%, Canon muag 122 units suav rau 30%, thiab Nikon muag 33 units suav rau 8%.