Hydrogen Chlorideyog cov pa roj tsis muaj ntxhiab tsw nrog lub pungent tsw. Nws cov kua aqueous yog hu ua cov kua roj afrochloric acid, tseem hu ua cov kua qaub hydrochloric acid. Hydrogen chloride yog soluble heev hauv dej. Ntawm 0 ° C, 1 ntim ntawm cov dej tuaj yeem yaj txog 500 tagnrho ntawm hydrogen chloride.

Nws muaj cov khoom hauv qab no thiab cov yam ntxwv:

1. Lub Siab Purity

Lub purity ntawm cov electronic qibHydrogen ChlorideYog heev, feem ntau nyob rau ppm lossis qib qis dua, kom ntseeg tau tias tsis muaj qhov cuam tshuam rau hauv cov txheej txheem sib raug zoo.

2. Inertness

Nws yog cov roj hauv cov pa hluav taws xob uas tsis muaj kev cuam tshuam nrog ntau lwm cov tshuaj, uas yog ib qho tseem ceeb heev kom tiv thaiv kev paug cov ntaub ntawv thiab khoom siv.

3. Lub siab muaj kev ruaj khov

Qib hluav taws xobHydrogen ChlorideFeem ntau muaj cov chemistry ruaj khov kom ntseeg tau tias txhim khu kev qha semiconductor ua.

Hauv cov semiconductor ua, cov ntawv thov tseem ceeb ntawm hluav taws xob qib qib hydrogen chloride suav nrog:

1. Nto tu thiab npaj

Raws li ib qho txiaj ntsig deg vacuum, electronic qibHydrogen Chlorideyog siv los tshem tawm cov oxides thiab impurities los ntawm substrate saum npoo los xyuas kom zoo thiab huv ntawm cov txheej ecitaxial lossis yeeb yaj kiab.

2.iCitaxial kev loj hlob pab

Siv los ua tus neeg saib xyuas kev kho mob hauv lub nroog, nws pab txhim kho cov txheej txheem zoo, txhim kho kev sib txuam, thiab txo qhov kev tsim ntawm cov tawv nqaij tawv nqaij.

3. Substrate pretricement

Ua ntej npaj ntawm semiconductor li, hluav taws xob qibHydrogen ChlorideYuav siv tau los kho cov npoo av los ua kom muaj lub hauv paus ruaj khov los txhim kho cov nplaum ntawm cov txheej txheej ntawm cov txheej uas epitaxial thiab substrate.

4. Tso cai rau tus neeg sawv cev

Nyob rau hauv tus txheej txheem ntawm kev tshuaj lom neeg vapor deposition (CVD) lossis lub cev vapor dependition (PVD), hluav taws xob qib hloov pauv tuaj yeem koom nrog cov khoom tso tawm hauv qib siab.

5. Cov roj-theem hloov chaw

Raws li cov roj av-theem hloov chaw, lwm cov khoom siv ua ntej tau qhia rau cov tshuaj tiv thaiv chamber kom pab kho tus nqi tso tawm tus nqi thiab cov khoom siv sib txawv ntawm cov khoom siv.

Cov yam ntxwv no ua rau qib hluav taws xobHydrogen ChlorideTus neeg saib xyuas kev ua haujlwm tseem ceeb hauv semiconductor thev naus laus zis, uas muaj qhov cuam tshuam tseem ceeb ntawm kev ua tau zoo thiab kev ntseeg tau ntawm lub ntaus ntawv kawg.

Ntxiv rau nws siv nyob rau hauv semiconductor ua, hluav taws xob qib qib, roj av, cov ntaub ntawv tshuaj xyuas, tshawb xyuas cov tshuaj lom neeg.

Nyob rau hauv qib siab, hluav taws xob hluav taws xobHydrogen Chlorideyog ib qho ntau yam, cov roj siab heev uas muaj ntau cov kev siv sab nraud ntawm cov kev lag luam sab nraud.