Hydrogen chlorideyog ib qho roj tsis muaj xim nrog ib qho tsw ntxhiab tsw qab. Nws cov kua dej hu ua hydrochloric acid, tseem hu ua hydrochloric acid. Hydrogen chloride yaj tau zoo heev hauv dej. Thaum 0°C, 1 ntim dej tuaj yeem yaj txog 500 ntim ntawm hydrogen chloride.

Nws muaj cov yam ntxwv thiab cov yam ntxwv hauv qab no:

1. Kev huv siab

Qhov purity ntawm qib hluav taws xobhydrogen chlorideyog siab heev, feem ntau ntawm ppm lossis qis dua, kom ntseeg tau tias tsis muaj cov khoom tsis huv nkag mus rau hauv cov txheej txheem tsim khoom semiconductor.

2. Kev tsis muaj zog

Nws yog cov roj inert uas tsis tshua muaj tshuaj lom neeg uas tsis cuam tshuam nrog ntau lwm yam tshuaj, uas yog qhov tseem ceeb heev rau kev tiv thaiv kev ua qias tuaj ntawm cov ntaub ntawv semiconductor thiab cov khoom siv.

3. Kev ruaj khov siab

Qib hluav taws xobhydrogen chloridefeem ntau muaj cov tshuaj lom neeg ruaj khov kom ntseeg tau tias cov txheej txheem semiconductor txhim khu kev qha.

Hauv kev ua cov khoom siv semiconductor, cov ntawv thov tseem ceeb ntawm cov tshuaj hydrogen chloride qib hluav taws xob suav nrog:

1. Kev ntxuav thiab npaj qhov chaw

Ua ib qho tshuaj ntxuav qhov chaw zoo, qib hluav taws xobhydrogen chlorideyog siv los tshem tawm cov oxides thiab cov khoom tsis huv ntawm qhov chaw substrate kom ntseeg tau tias qhov zoo thiab purity ntawm epitaxial txheej lossis zaj duab xis.

2. Kev pab txhawb kev loj hlob ntawm Epitaxial

Siv ua tus neeg sawv cev kho qhov chaw hauv cov txheej txheem epitaxial, nws pab txhim kho qhov zoo ntawm cov txheej epitaxial, txhim kho kev sib phim lattice, thiab txo qhov tsim ntawm cov lattice defects.

3. Kev kho ua ntej ntawm cov khoom siv

Ua ntej kev npaj cov khoom siv semiconductor, qib hluav taws xobhydrogen chloridesiv tau los kho qhov chaw saum npoo av kom tsim tau lub hauv paus ruaj khov los txhim kho qhov kev sib txuas ntawm cov txheej epitaxial thiab cov substrate.

4. Tus neeg sawv cev pabcuam tso tawm

Hauv cov txheej txheem ntawm cov tshuaj lom neeg vapor deposition (CVD) lossis lub cev vapor deposition (PVD), qib hluav taws xob hydrogen chloride tuaj yeem siv los ua cov roj theem hloov pauv nruab nrab kom koom nrog hauv cov tshuaj tiv thaiv deposition ntawm cov ntaub ntawv semiconductor.

5. Tus neeg sawv cev hloov pauv roj-theem

Ua tus neeg sawv cev hloov pauv roj-theem, lwm cov roj ua ntej raug coj mus rau hauv chav tshuaj tiv thaiv los pab kho qhov nrawm thiab kev sib xws ntawm cov khoom.

Cov yam ntxwv no ua rau qib hluav taws xobhydrogen chlorideib qho tseem ceeb ua tus neeg sawv cev hauv kev siv tshuab semiconductor, uas muaj qhov cuam tshuam tseem ceeb rau kev ua tau zoo thiab kev ntseeg siab ntawm lub cuab yeej kawg.

Ntxiv rau nws siv rau hauv kev ua cov khoom siv semiconductor, cov khoom siv hluav taws xob hydrogen chloride tuaj yeem nrhiav tau ntau yam kev siv hauv lwm qhov chaw, suav nrog: Kev npaj cov khoom siv purity siab, Cov roj cell, Kev loj hlob ntawm cov khoom siv semiconductor, Vapor Phase Lithography, Kev tshuaj xyuas cov khoom siv, Kev tshawb fawb txog tshuaj lom neeg.

Feem ntau, qib hluav taws xobhydrogen chlorideyog ib qho roj uas siv tau ntau yam, muaj cov khoom huv siab uas muaj ntau yam kev siv sab nraum kev tsim khoom semiconductor.