Hauv kev tsim cov txheej txheem ntawm semiconductor wafer foundries nrog cov txheej txheem ntau lawm, yuav tsum muaj ze li 50 hom roj sib txawv. Gases feem ntau muab faib ua bulk gases thiabroj tshwj xeeb.

Kev siv cov pa roj hauv microelectronics thiab semiconductor industries Kev siv cov pa roj ib txwm ua lub luag haujlwm tseem ceeb hauv cov txheej txheem semiconductor, tshwj xeeb tshaj yog cov txheej txheem semiconductor tau siv dav hauv ntau yam lag luam. Los ntawm ULSI, TFT-LCD mus rau kev lag luam micro-electromechanical (MEMS) tam sim no, cov txheej txheem semiconductor yog siv los ua cov txheej txheem tsim khoom, suav nrog qhuav etching, oxidation, ion implantation, nyias zaj duab xis deposition, thiab lwm yam.

Piv txwv li, ntau tus neeg paub tias chips yog ua los ntawm cov xuab zeb, tab sis saib tag nrho cov txheej txheem ntawm chip manufacturing, ntau cov ntaub ntawv xav tau, xws li photoresist, polishing kua, lub hom phiaj khoom, roj tshwj xeeb, thiab lwm yam yog indispensable. Back-end ntim kuj yuav tsum tau substrates, interposers, txhuas thav duab, cov ntaub ntawv sib txuas, thiab lwm yam ntawm ntau yam ntaub ntawv. Cov roj hluav taws xob tshwj xeeb yog cov khoom siv loj tshaj plaws thib ob hauv cov nqi tsim khoom semiconductor tom qab silicon wafers, ua raws li qhov ncauj qhov ntswg thiab photoresists.

Lub purity ntawm cov pa roj muaj qhov kev txiav txim siab ntawm kev ua haujlwm ntawm cov khoom siv thiab cov khoom lag luam, thiab kev nyab xeeb ntawm cov khoom siv roj muaj feem xyuam rau kev noj qab haus huv ntawm cov neeg ua haujlwm thiab kev nyab xeeb ntawm kev ua haujlwm ntawm lub Hoobkas. Vim li cas qhov purity ntawm cov roj muaj qhov cuam tshuam zoo rau cov txheej txheem thiab cov neeg ua haujlwm? Qhov no tsis yog exaggeration, tab sis yog txiav txim los ntawm cov yam ntxwv txaus ntshai ntawm cov roj nws tus kheej.

Kev faib tawm ntawm cov pa roj hauv kev lag luam semiconductor

Ordinary Gas

Ordinary gas kuj yog hu ua bulk gas: nws yog hais txog kev lag luam roj nrog purity yuav tsum qis dua 5N thiab ntau lawm thiab muag ntim. Nws tuaj yeem muab faib ua cua sib cais roj thiab cov roj hluavtaws raws li kev npaj sib txawv. Hydrogen (H2), nitrogen (N2), oxygen (O2), argon (A2), thiab lwm yam.

Tshwj xeeb Gas

Cov roj tshwj xeeb yog hais txog kev lag luam roj uas siv rau hauv thaj chaw tshwj xeeb thiab muaj cov kev cai tshwj xeeb rau purity, ntau yam, thiab cov khoom. Feem ntauSiH 4PH3, B2H6, A8H3,HCL, CF4,NH3POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF 6… thiab lwm yam.

Hom Spicial gases

Hom tshwj xeeb gases: corrosive, toxic, flammable, combustion-txhawb, inert, thiab lwm yam.
Feem ntau siv semiconductor gases yog cais raws li hauv qab no:
(i) Corrosive/toxic:HClBF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2,BCl3…
(ii) Flammable: H2,CH4,SiH 4PH3, AsH3, SiH2Cl2, B2H6, CH2F2, CH3F, CO...
(iii) Combustible: O2, Cl2, N2O, NF3…
(iv) Inert: N2,CF 4、 C2F6 、C4F 8,SF 6、 CO2 、Ne,Kr, Nws…

Nyob rau hauv cov txheej txheem ntawm semiconductor nti manufacturing, txog 50 ntau hom roj tshwj xeeb (hu ua tshwj xeeb gases) yog siv nyob rau hauv oxidation, diffusion, deposition, etching, txhaj tshuaj, photolithography thiab lwm yam txheej txheem, thiab tag nrho cov txheej txheem ntau tshaj pua pua. Piv txwv li, PH3 thiab AsH3 yog siv los ua phosphorus thiab arsenic qhov chaw nyob rau hauv cov txheej txheem ion implantation, F-based gases CF4, CHF3, SF6 thiab halogen gases CI2, BCI3, HBr feem ntau siv rau hauv cov txheej txheem etching, SiH4, NH3, N2O hauv txheej txheem zaj duab xis deposition, F2/Kr/Ne, Kr/Ne nyob rau hauv cov txheej txheem photolithography.

Los ntawm cov lus saum toj no, peb tuaj yeem nkag siab tias ntau cov pa roj semiconductor muaj kev phom sij rau tib neeg lub cev. Tshwj xeeb, qee cov pa roj, xws li SiH4, yog tus kheej-igniting. Tsuav lawv xau, lawv yuav hnov ​​​​mob hnyav nrog cov pa oxygen hauv huab cua thiab pib hlawv; thiab AsH3 yog tshuaj lom heev. Ib qho kev xau me me tuaj yeem ua rau muaj kev puas tsuaj rau tib neeg lub neej, yog li qhov yuav tsum tau ua rau kev nyab xeeb ntawm kev tswj hwm kev tsim qauv rau kev siv cov pa roj tshwj xeeb tshwj xeeb.

Semiconductors xav tau cov roj purity siab kom muaj "peb degrees"

Gas purity

Cov ntsiab lus ntawm impurity cua nyob rau hauv cov pa feem ntau yog qhia raws li ib feem pua ​​ntawm cov pa purity, xws li 99.9999%. Feem ntau hais lus, purity yuav tsum tau rau hluav taws xob tshwj xeeb gases mus txog 5N-6N, thiab kuj qhia los ntawm lub ntim piv ntawm impurity cua ntsiab lus ppm (ib feem lab), ppb (ib feem ib billion), thiab ppt (ib feem ib trillion). Lub tshuab hluav taws xob semiconductor muaj qhov xav tau siab tshaj plaws rau purity thiab zoo stability ntawm cov pa roj tshwj xeeb, thiab purity ntawm hluav taws xob tshwj xeeb gases feem ntau ntau dua 6N.

Qhuav

Cov ntsiab lus ntawm cov dej nyob hauv cov roj, los yog ntub dej, feem ntau yog qhia nyob rau hauv dew point, xws li atmospheric dew point -70 ℃.

Kev huv huv

Tus naj npawb ntawm cov pa phem hauv cov pa, cov khoom uas muaj qhov loj me ntawm µm, qhia nyob rau hauv pes tsawg particles / M3. Rau cov cua compressed, nws yog feem ntau hais nyob rau hauv mg / m3 ntawm unavoidable khoom residues, uas muaj xws li roj cov ntsiab lus.