Qhov loj tshaj plaws ntawm cov hluav taws xob tshwj xeeb roj - nitrogen trifluoride NF3

Peb lub teb chaws cov semiconductor kev lag luam thiab vaj huam sib luag kev lag luam kom muaj kev vam meej theem siab. Nitrogen trifluide, raws li kev tsis tseem ceeb thiab ntim loj tshaj plaws hauv tshuab hluav taws xob hauv kev tsim khoom thiab kev ua cov vaj huam sib luag thiab cov semiconductors, muaj qhov chaw ua lag luam dav.

Feem ntau siv fluorine-muaj cov roj hluav taws xob tshwj xeeb hauv hluav taws xob muaj xws liSulphur hexafluoride (SF6), tungsten hexafluoride (WF6),Cov pa roj carbon tetraflide (cf4), trifluoromethane (chf3), nitrogen trifluoride (NF3), hexafluoroethane (c2f6) thiab octafluoropnane (C3f8). Nitrogen trifluide (NF3) yog tsuas yog siv raws li lub fluorine rau hydrogen fluoride-fluoride roj siab-zog tshuaj lasers. Qhov txiaj ntsig zoo (kwv yees li 25%) ntawm cov tshuaj tiv thaiv lub zog ntawm H2-O2 tuaj yeem tso tawm los ntawm laser hluav taws xob, yog li cov laser HF-ntawm cov lasers uas muaj kev cia siab tshaj plaws.

Nitrogen trifluoride yog ib qho zoo heev plasma etching roj nyob rau hauv microelectronics kev lag luam. Rau etching silicon thiab silicon nitride, nitrogen trifluoride muaj ntau dua cov roj carbon tetrafluide thiab oxygen, thiab tsis muaj kuab paug rau saum npoo. Tshwj xeeb tshaj yog nyob rau hauv kev etching ntawm cov ntaub ntawv sib xyaw nrog tsawg dua 1.5um, tsis muaj cov khoom seem ntawm qhov chaw etched, thiab kuj yog tus neeg sawv cev huv heev. Nrog rau kev txhim kho ntawm Nanotechnology thiab kev txhim kho loj ntawm cov kev lag luam hluav taws xob, nws qhov kev thov yuav nce hnub los ntawm ib hnub.

Raws li hom fluorine uas muaj cov roj tshwj xeeb, nitrogen trifluoride (NF3) yog qhov loj tshaj plaws hauv hluav taws xob tshwj xeeb hauv khw. Nws yog cov tshuaj ntsuas ntawm chav sov, nquag ntau dua oxygen, ntau dua ruaj khov tshaj li cov tshuaj fluorine, thiab muab cov pa taws kub.

Nitrogen trifluoride yog siv los ua cov roj av etching roj thiab cov tshuaj tiv thaiv chamber tu tus neeg saib xyuas, cov khoom siv kho qhov muag, ntsuas hluav taws xob hlwb, thiab lwm yam.

Piv nrog lwm cov tshuaj fluorine uas muaj cov roj txheem hluav taws xob muaj qhov zoo li cov khoom siv sib txawv, thiab nws tsis yog kev ua kom zoo nkauj rau saum npoo thiab tuaj yeem ua tau raws li qhov xav tau ntawm cov txheej txheem kev ua tiav.