Peb lub teb chaws kev lag luam semiconductor thiab kev lag luam vaj huam sib luag tswj hwm qib siab ntawm kev vam meej. Nitrogen trifluoride, ua ib qho roj hluav taws xob tshwj xeeb tseem ceeb thiab muaj ntau tshaj plaws hauv kev tsim thiab ua cov vaj huam sib luag thiab semiconductors, muaj qhov chaw ua lag luam dav.
Cov pa roj hluav taws xob tshwj xeeb uas muaj fluorine feem ntau siv suav nrogsulfur hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) thiab octafluoropropane (C3F8). Nitrogen trifluoride (NF3) feem ntau yog siv ua qhov chaw fluorine rau hydrogen fluoride-fluoride roj high-energy chemical lasers. Qhov ua tau zoo (kwv yees li 25%) ntawm lub zog tshuaj tiv thaiv ntawm H2-O2 thiab F2 tuaj yeem tso tawm los ntawm laser hluav taws xob, yog li HF-OF lasers yog cov lasers cog lus tshaj plaws ntawm cov tshuaj lasers.
Nitrogen trifluoride yog ib qho roj plasma etching zoo heev hauv kev lag luam microelectronics. Rau etching silicon thiab silicon nitride, nitrogen trifluoride muaj qhov siab dua etching tus nqi thiab kev xaiv dua li carbon tetrafluoride thiab sib xyaw ntawm carbon tetrafluoride thiab oxygen, thiab tsis muaj kuab paug rau qhov chaw. Tshwj xeeb tshaj yog nyob rau hauv etching ntawm cov ntaub ntawv sib xyaw ua ke nrog lub thickness tsawg dua 1.5um, nitrogen trifluoride muaj qhov zoo heev etching tus nqi thiab kev xaiv, tsis tawm cov khoom seem ntawm qhov chaw ntawm cov khoom etched, thiab kuj yog ib tug neeg sawv cev zoo heev. Nrog rau kev txhim kho ntawm nanotechnology thiab kev txhim kho loj ntawm kev lag luam electronics, nws qhov kev thov yuav nce ntxiv txhua hnub.
Ua ib hom roj tshwj xeeb uas muaj fluorine, nitrogen trifluoride (NF3) yog cov khoom siv hluav taws xob tshwj xeeb loj tshaj plaws hauv kev ua lag luam. Nws tsis muaj zog thaum sov li chav tsev, nws ua haujlwm ntau dua li oxygen, ruaj khov dua li fluorine, thiab yooj yim rau kev siv thaum kub siab.
Nitrogen trifluoride feem ntau yog siv los ua cov roj plasma etching thiab cov tshuaj ntxuav chav ua haujlwm, tsim nyog rau kev tsim khoom xws li cov chips semiconductor, cov zaub vaj huam sib luag tiaj tus, cov fiber ntau optical, cov hlwb photovoltaic, thiab lwm yam.
Piv nrog rau lwm cov pa roj fluorine uas muaj cov khoom siv hluav taws xob, nitrogen trifluoride muaj qhov zoo ntawm kev ua haujlwm sai thiab kev ua haujlwm zoo, tshwj xeeb tshaj yog nyob rau hauv kev etching ntawm cov khoom siv silicon xws li silicon nitride, nws muaj qhov nrawm etching thiab kev xaiv siab, tsis muaj cov khoom seem ntawm qhov chaw ntawm cov khoom etched, thiab kuj yog tus neeg sawv cev ntxuav zoo heev, thiab nws tsis ua rau muaj kuab paug rau qhov chaw thiab tuaj yeem ua tau raws li qhov xav tau ntawm cov txheej txheem ua tiav.
Lub sijhawm tshaj tawm: Lub Kaum Ob Hlis-26-2024
