Cov roj hluav taws xob tshwj xeeb uas siv ntau tshaj plaws - nitrogen trifluoride

Cov pa roj hluav taws xob tshwj xeeb uas muaj fluorine suav nrogsulfur hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) thiab octafluoropropane (C3F8).

Nrog rau kev txhim kho ntawm nanotechnology thiab kev txhim kho loj ntawm kev lag luam hluav taws xob, nws qhov kev thov yuav nce ntxiv txhua hnub. Nitrogen trifluoride, ua cov roj hluav taws xob tshwj xeeb uas tsis tuaj yeem tsim tau thiab siv ntau tshaj plaws hauv kev tsim khoom thiab kev ua cov vaj huam sib luag thiab semiconductors, muaj qhov chaw ua lag luam dav.

Ua ib hom roj tshwj xeeb uas muaj fluorine,nitrogen trifluoride (NF3)yog cov khoom siv hluav taws xob tshwj xeeb uas muaj peev xwm ua lag luam loj tshaj plaws. Nws tsis muaj zog thaum sov li chav tsev, ua haujlwm ntau dua li cov pa oxygen thaum kub siab, ruaj khov dua li fluorine, thiab yooj yim rau kev tuav. Nitrogen trifluoride feem ntau yog siv los ua cov roj plasma etching thiab cov tshuaj ntxuav chav ua haujlwm, thiab nws tsim nyog rau kev tsim cov khoom siv semiconductor chips, cov zaub vaj huam sib luag tiaj tus, cov fibers optical, cov hlwb photovoltaic, thiab lwm yam.

Piv nrog rau lwm cov pa roj fluorine uas muaj cov khoom siv hluav taws xob,nitrogen trifluoridemuaj qhov zoo ntawm kev teb sai thiab ua haujlwm tau zoo. Tshwj xeeb tshaj yog nyob rau hauv kev etching ntawm cov ntaub ntawv uas muaj silicon xws li silicon nitride, nws muaj tus nqi etching siab thiab kev xaiv, tsis muaj cov khoom seem ntawm qhov chaw ntawm cov khoom etched. Nws kuj yog ib tug neeg sawv cev zoo heev thiab tsis muaj kuab paug rau qhov chaw, uas tuaj yeem ua tau raws li qhov xav tau ntawm cov txheej txheem ua.