Feem ntau siv hluav taws xob tshwj xeeb roj - nitrogen trifluoride

Cov tshuaj fluorine uas muaj cov roj hluav taws xob tshwj xeeb muaj hluav taws xobSulphur hexafluoride (SF6), tungsten hexafluoride (WF6),Cov pa roj carbon tetraflide (cf4), trifluoromethane (chf3), nitrogen trifluoride (NF3), hexafluoroethane (c2f6) thiab octafluoropnane (C3f8).

Nrog rau kev txhim kho ntawm Nanotechnology thiab kev txhim kho loj ntawm cov kev lag luam hluav taws xob, nws qhov kev thov yuav nce hnub los ntawm ib hnub. Nitrogen trifluide, raws li kev tsis tseem ceeb thiab ntau tshaj plaws siv hluav taws xob roj hluav taws xob hauv kev tsim khoom thiab kev ua cov vaj huam sib luag thiab cov semiconductors, muaj qhov chaw ua lag luam dav.

Raws li hom fluorine uas muaj cov roj tshwj xeeb,Nitrogen trifluoride (NF3)yog lub tshuab hluav taws xob tshwj xeeb roj nrog cov khoom lag luam muaj peev xwm loj tshaj plaws. Nws yog cov tshuaj ntsuas ntawm chav sov, nquag ntau dua oxygen ntawm qhov kub thiab txias, ntau dua ruaj khov, thiab tuav tau yooj yim. Nitrogen trifluoride yog siv los ua cov ntshav etching roj thiab yog qhov kev tsim khoom lag luam tu cov neeg saib xyuas, thiab yog cov tshuaj tiv thaiv optical, thiab lwm yam.

Piv nrog lwm cov tshuaj fluorine uas muaj cov roj txheem hluav taws xob hauv tshuab hluav taws xob,Nitrogen trifluoridemuaj qhov zoo ntawm kev siv tshuaj sai thiab ua haujlwm siab. Tshwj xeeb tshaj yog nyob rau hauv lub etching ntawm silicon-muaj cov ntaub ntawv xws li Silicon Nitride, nws muaj qhov siab etching thiab xaiv tsis muaj nyob ntawm qhov chaw ntawm etched khoom. Nws tseem yog tus neeg sawv cev huv heev thiab tsis muaj kuab paug rau saum npoo, uas tuaj yeem ua tau raws li cov kev xav tau ntawm kev ua tiav.