Tungsten hexafluoride (WF6) tau muab tso rau saum npoo ntawm cov txheej txheem CVD los ntawm CVD txheej txheem trenches, thiab sib sau cov hlau sib txuas ntawm cov khaubncaws sab nraud povtseg.
Cia peb tham txog ntshav ua ntej. Ntshav yog ib hom teeb meem tsuas yog muab cov tshuab hluav taws xob dawb thiab them ions. Nws tshwm sim dav nyob rau hauv lub qab ntuj thiab feem ntau yog suav tias yog plaub lub xeev ntawm teeb meem. Nws yog hu ua Plasma State, tseem hu ua "ntshav". Ntshav muaj hluav taws xob muaj hluav taws xob siab thiab muaj cov kev sib txuas muaj zog nrog cov nyhuv hluav taws xob. Nws yog cov roj ionized ionized, muaj ntawm cov tshuab hluav taws xob, ions, dawb radicals, nruab nrab ntawm nruab nrab, thiab photons. Cov ntshav ntshav nws tus kheej yog cov hluav taws xob nruab nrab hluav taws xob muaj lub cev thiab cov tshuaj nquag ua haujlwm.
Qhov kev piav qhia ncaj qha yog tias nyob rau hauv qhov kev txiav txim ntawm lub zog siab, cov molecule yuav kov yeej cov van derals thiab couldomal zog, thiab nthuav tawm ib daim ntawv ntawm nruab nrab hluav taws xob tag nrho. Nyob rau tib lub sijhawm, lub zog siab imparted los ntawm sab nraud kov yeej cov saum peb lub zog. Muaj nuj nqi, tshuab hluav taws xob thiab ions tam sim no siv nyob rau hauv cov kev sib nqus, xws li cov txheej txheem sib nqus, cov txheej txheem CVD, PVD thiab txheej txheem impd.
Lub zog yog dab tsi? Hauv kev tshawb xav, ob qho kub thiab kub zaus RF tuaj yeem siv tau. Feem ntau hais lus, kub yog yuav luag tsis yooj yim to taub. Qhov ntsuas qhov kub thiab txias thiab yuav ze rau lub hnub kub. Nws yog qhov tsis yooj yim sua kom ua tiav hauv cov txheej txheem. Yog li ntawd, kev lag luam feem ntau siv high-zaus rf kom ua tiav nws. Plasma RF tuaj yeem ncav cuag kom tau nyiaj siab npaum li 13MHz +.
Tungsten hexafluoride yog plasmaized nyob rau hauv qhov kev txiav txim ntawm ib daim teb hluav taws xob, thiab tom qab ntawd vapor-tso los ntawm kev sib nqus. Wtoms zoo ib yam li lub caij ntuj no goose plaub thiab poob rau hauv av raws li kev txiav txim ntawm kev nqus. Maj mam, w atoms tau muab tso rau hauv qhov, thiab thaum kawg tau sau tag nrho los ntawm qhov los ua cov hlau sib txuas. Ntxiv rau kev ua kev tso kev ua kom muaj atoms nyob rau hauv lub qhov, lawv puas yuav muab tso rau saum npoo ntawm wafer? Yog, twv yuav raug hu. Feem ntau hais lus, koj tuaj yeem siv cov txheej txheem W-CMP, uas yog qhov peb hu rau txoj kev sib tsoo txhua yam kom tshem tawm. Nws zoo ib yam li siv tus khaub rhuab mus cheb hauv pem teb tom qab cov daus hnyav. Cov daus hauv av yog tau ploj mus, tab sis cov daus hauv lub qhov hauv av yuav nyob. Down, ntxhib tib yam.
Lub Sijhawm Post: Kaum-24-2021
