Tungsten hexafluoride (WF6) tso rau saum npoo ntawm wafer los ntawm CVD txheej txheem, sau cov hlau sib txuas trenches, thiab tsim cov hlau sib txuas ntawm cov txheej txheem.
Cia peb tham txog plasma ua ntej. Plasma yog ib hom teeb meem feem ntau yog tsim los ntawm cov hluav taws xob dawb thiab them ions. Nws muaj nyob thoob plaws hauv lub qab ntuj khwb thiab feem ntau suav hais tias yog lub xeev plaub ntawm teeb meem. Nws yog hu ua lub xeev plasma, tseem hu ua "plasma". Plasma muaj hluav taws xob conductivity siab thiab muaj zog txuas nrog electromagnetic teb. Nws yog ib nrab ionized roj, tsim ntawm electrons, ions, dawb radicals, nruab nrab hais, thiab photons. Lub plasma nws tus kheej yog ib qho hluav taws xob nruab nrab sib xyaw uas muaj cov khoom siv lub cev thiab tshuaj lom neeg.
Cov lus piav qhia ncaj nraim yog tias nyob rau hauv qhov kev ua ntawm lub zog siab, lub molecule yuav kov yeej lub van der Waals quab yuam, chemical bond force thiab Coulomb force, thiab nthuav tawm ib daim ntawv ntawm hluav taws xob nruab nrab tag nrho. Nyob rau tib lub sij hawm, lub zog siab imparted los ntawm sab nraud overcomes saum peb lub zog. Kev ua haujlwm, cov khoom siv hluav taws xob thiab ions nthuav tawm lub xeev dawb, uas tuaj yeem siv dag zog raws li kev hloov pauv ntawm cov hlau nplaum, xws li cov txheej txheem semiconductor etching, CVD txheej txheem, PVD thiab IMP txheej txheem.
Lub zog siab yog dab tsi? Hauv kev xav, ob qho tib si kub thiab siab zaus RF tuaj yeem siv tau. Feem ntau hais lus, qhov kub thiab txias yuav luag tsis tuaj yeem ua tiav. Qhov kev ntsuas kub no siab dhau lawm thiab tej zaum yuav ze rau lub hnub kub. Nws yog qhov yooj yim tsis yooj yim sua kom ua tiav hauv cov txheej txheem. Yog li ntawd, kev lag luam feem ntau yog siv high-frequency RF kom ua tiav nws. Plasma RF tuaj yeem ncav cuag siab li 13MHz +.
Tungsten hexafluoride yog plasmaized nyob rau hauv qhov kev txiav txim ntawm ib qho hluav taws xob teb, thiab ces vapor-deposited los ntawm ib tug magnetic teb. W atoms zoo ib yam li lub caij ntuj no goose feathers thiab poob rau hauv av nyob rau hauv qhov kev txiav txim ntawm lub ntiajteb txawj nqus. Maj mam, W atoms tau tso rau hauv qhov dhau los, thiab thaum kawg tau ntim puv hauv qhov los tsim cov hlau sib txuas. Ntxiv nrog rau kev tso W atoms hauv qhov los ntawm qhov, lawv puas yuav muab tso rau saum npoo ntawm Wafer? Yog, twv yuav raug hu. Feem ntau hais lus, koj tuaj yeem siv cov txheej txheem W-CMP, uas yog qhov peb hu ua cov txheej txheem sib tsoo tshuab kom tshem tawm. Nws zoo ib yam li siv tus pas txhuam hniav los cheb hauv pem teb tom qab daus hnyav. Cov daus nyob rau hauv av yog hws, tab sis cov daus nyob rau hauv lub qhov nyob rau hauv av yuav nyob twj ywm. Down, roughly tib yam.
Post lub sij hawm: Dec-24-2021
