Hluav taws xobroj tshwj xeebyog ib ceg tseem ceeb ntawm cov roj tshwj xeeb. Lawv nkag mus yuav luag txhua qhov txuas ntawm cov khoom siv hluav taws xob semiconductor thiab yog cov khoom siv tsis tseem ceeb rau kev tsim hluav taws xob hauv kev lag luam xws li ultra-loj-scale integrated circuits, vaj huam sib luag vaj huam sib luag zaub, thiab hnub ci hlwb.

Hauv kev siv tshuab semiconductor, fluorine-muaj roj tau siv dav. Tam sim no, hauv kev lag luam hluav taws xob hluav taws xob thoob ntiaj teb, fluorine-muaj cov hluav taws xob hluav taws xob suav txog li 30% ntawm tag nrho. Cov roj hluav taws xob uas muaj fluorine yog ib qho tseem ceeb ntawm cov roj hluav taws xob tshwj xeeb hauv cov ntaub ntawv xov xwm hluav taws xob. Lawv feem ntau yog siv los ua cov tshuaj ntxuav thiab etching, thiab tseem tuaj yeem siv ua dopants, cov ntaub ntawv tsim cov yeeb yaj kiab, thiab lwm yam.

Cov hauv qab no feem ntau siv cov roj fluorine-muaj roj

Nitrogen trifluoride (NF3): Cov roj siv los ntxuav thiab tshem tawm cov deposits, feem ntau yog siv los ntxuav cov tshuaj tiv thaiv chav thiab cov khoom siv.

Sulfur hexafluoride (SF6): Ib tug fluorinating tus neeg saib xyuas siv nyob rau hauv oxide deposition txheej txheem thiab raws li ib tug insulating gas rau sau insulating xov xwm.

Hydrogen fluoride (HF): Siv los tshem tawm oxides ntawm silicon nto thiab ua ib qho etchant rau etching silicon thiab lwm yam ntaub ntawv.

Nitrogen fluoride (NF): Siv rau etch cov ntaub ntawv xws li silicon nitride (SiN) thiab txhuas nitride (AlN).

Trifluoromethane (CHF3) thiabTom ntej: tetrafluoromethane (CF4): Siv rau etch fluoride cov ntaub ntawv xws li silicon fluoride thiab txhuas fluoride.

Txawm li cas los xij, cov pa roj fluorine muaj qee yam kev phom sij, suav nrog tshuaj lom, corrosiveness, thiab flammability.

Toxicity

Qee cov roj fluorine muaj cov tshuaj lom, xws li hydrogen fluoride (HF), uas nws cov vapor ua rau tawv nqaij thiab ua pa thiab ua rau muaj kev phom sij rau tib neeg kev noj qab haus huv.

Corrosiveness

Hydrogen fluoride thiab qee cov fluorides yog cov corrosive heev thiab tuaj yeem ua rau muaj kev puas tsuaj loj rau daim tawv nqaij, qhov muag thiab ua pa.

Flammability

Qee cov fluorides flammable thiab hnov ​​​​mob nrog oxygen lossis dej hauv huab cua kom tso cov cua sov thiab cov pa phem, uas yuav ua rau hluav taws kub lossis tawg.

Kev phom sij siab

Qee cov roj fluorinated yog tawg nyob rau hauv lub siab thiab xav tau kev saib xyuas tshwj xeeb thaum siv thiab khaws cia.

Kev cuam tshuam rau ib puag ncig

Cov roj uas muaj fluorine muaj lub neej nyob hauv huab cua siab thiab GWP qhov tseem ceeb, uas ua rau muaj kev puas tsuaj rau cov huab cua ozone txheej thiab tej zaum yuav ua rau lub ntiaj teb sov sov thiab ib puag ncig muaj kuab paug.

Daim ntawv thov ntawm cov pa roj hauv cov chaw tawm tshiab xws li cov khoom siv hluav taws xob txuas ntxiv mus tob zuj zus, nqa ntau qhov kev thov tshiab rau cov khoom siv hluav taws xob. Raws li qhov loj ntawm cov khoom muaj peev xwm tshiab ntawm cov khoom siv hluav taws xob loj xws li cov khoom siv hluav taws xob thiab cov khoom siv hluav taws xob hauv Suav teb hauv ob peb xyoos tom ntej no, nrog rau qhov kev thov muaj zog rau kev hloov pauv ntawm cov khoom siv hluav taws xob, kev lag luam hauv hluav taws xob hauv tsev yuav ua rau muaj zog. kev loj hlob siab.