HauvCov Khoom Siv Tshwj Xeeb Tshwj Xeebyog cov ceg tseem ceeb ntawm cov roj tshwj xeeb. Lawv nkag mus yuav luag txhua qhov txuas ntawm semiconductor ntau lawm thiab yog indispensable raw cov ntaub ntawv rau cov khoom siv hluav taws xob xws li ultra-nplai zaub ua haujlwm, thiab lub hnub ci hlwb.

Hauv cov thev naus laus zis semiconductor, fluorine-muaj cov roj av tau siv dav. Tam sim no, nyob rau hauv lub ntiaj teb hluav taws xob roj ua lag luam, fluorine muaj cov roj hluav taws xob hauv cov nyiaj rau hauv 30% ntawm tag nrho. Fluorine-muaj cov roj txheem hluav taws xob hauv tshuab hluav taws xob yog ib qho tseem ceeb ntawm cov roj hluav taws xob tshwj xeeb hauv cov ntaub ntawv hauv hluav taws xob. Lawv feem ntau yog siv los ua cov neeg sawv cev tu thiab etching cov neeg sawv cev, thiab tseem siv tau ua Dopants, tus kws sau ntawv yuav coj koj los nkag siab txog cov tshuaj fluorine uas muaj cov roj.

Cov hauv qab no yog siv fluorine feem ntau-muaj roj av

Nitrogen trifluide (NF3): Siv roj siv rau kev ntxuav thiab tshem cov kev tso nyiaj, feem ntau yog siv rau kev tu cov leeg thiab khoom siv.

Sulphur hexafluoride (SF6): Cov tshuaj fluorinating siv hauv cov txheej txheem Oxide Oxide Deposition thiab raws li cov roj insulating rau sau cov xov xwm insulating.

Hydrogen fluoride (HF): Siv tshem tawm oxides los ntawm silicon saum npoo thiab raws li ib tug etchant rau etching silicon thiab lwm yam ntaub ntawv.

Nitrogen fluoride (NF): Siv rau lwm yam ntaub ntawv xws li silicon nitride (kev txhaum) thiab txhuas nitride (aln).

Trifluoromethane (chf3) thiabTetraFluoromethane (CF4): Siv rau cov ntaub ntawv fluoride xws li Silicon fluoride thiab txhuas cov tshuaj fluoride.

Txawm li cas los xij, fluorine-muaj cov roj av muaj qee yam kev phom sij, suav nrog cov tshuaj lom, corrosiveness, thiab nplaim taws.

Lom zem

Qee cov tshuaj fluorine-muaj tshuaj lom yog tshuaj lom, xws li cov tshuaj fluoride hydrogide rau cov tawv nqaij thiab ua kom zoo rau tib neeg kev noj qab haus huv.

Kev corrosiveness

Hydrogen fluoride thiab qee cov tshuaj fluoride thiab cov tshuaj fluorive yog cov tshuaj fluorive heev thiab tuaj yeem ua rau tawv nqaij puas hnyav, qhov muag thiab ua pa ua pa.

Paj frammability

Qee cov tshuaj fluoride muaj cov nplaim taws nrog cov pa roj o lossis dej hauv huab cua kom tso pa hluav taws thiab cov roj lom kom haum lossis tawg.

Kev Nyab Xeeb Kev Nyab Xeeb

Qee cov roj fluorinated tau tawg tau tawg nyob rau hauv kev kub siab thiab xav tau kev saib xyuas tshwj xeeb thaum siv thiab khaws cia.

Cuam tshuam rau ib puag ncig

Fluorine-muaj cov roj av muaj cov roj av siab thiab GWP qhov tseem ceeb, uas muaj qhov ua kom sov thiab yuav ua rau ntiaj teb sov sov thiab ib puag ncig.

Daim ntawv thov cov roj hauv cov chaw tshwm sim xws li cov khoom siv hluav taws xob ntxiv kom tob zuj zus, nqa cov khoom siv tshiab ntawm kev siv roj. Raws li cov nyiaj ntau ntawm cov khoom siv hluav taws xob hluav taws xob ntxiv xws li cov khoom siv hluav taws xob, nrog rau cov khoom siv hluav taws xob tom ntej no, cov khoom siv hluav taws xob hauv tsev, kev lag luam hluav taws xob hauv tsev yuav pab tau.