Hluav taws xobcov pa roj tshwj xeebyog ib ceg tseem ceeb ntawm cov pa roj tshwj xeeb. Lawv nkag mus rau yuav luag txhua qhov txuas ntawm kev tsim khoom semiconductor thiab yog cov khoom siv tseem ceeb rau kev tsim khoom ntawm kev lag luam hluav taws xob xws li ultra-large-scale integrated circuits, flat panel display devices, thiab solar cells.

Hauv kev siv tshuab semiconductor, cov pa roj uas muaj fluorine siv dav heev. Tam sim no, hauv kev lag luam roj hluav taws xob thoob ntiaj teb, cov pa roj hluav taws xob uas muaj fluorine suav txog li 30% ntawm tag nrho. Cov pa roj hluav taws xob uas muaj fluorine yog ib qho tseem ceeb ntawm cov pa roj hluav taws xob tshwj xeeb hauv kev lag luam ntawm cov ntaub ntawv hluav taws xob. Lawv feem ntau yog siv los ua cov neeg ntxuav thiab cov neeg sawv cev etching, thiab kuj tseem siv tau ua cov dopants, cov ntaub ntawv tsim zaj duab xis, thiab lwm yam. Hauv tsab xov xwm no, tus sau yuav coj koj mus nkag siab txog cov pa roj uas muaj fluorine.

Cov hauv qab no yog cov pa roj uas muaj fluorine feem ntau siv

Nitrogen trifluoride (NF3): Ib qho roj siv rau kev ntxuav thiab tshem tawm cov khib nyiab, feem ntau yog siv rau kev ntxuav cov chav ua tshuaj thiab cov khoom siv.

Sulfur hexafluoride (SF6): Ib tug neeg sawv cev fluorinating siv rau hauv cov txheej txheem oxide deposition thiab ua ib qho roj insulating rau kev sau cov xov xwm insulating.

Hydrogen fluoride (HF): Siv los tshem tawm cov oxides ntawm qhov chaw silicon thiab ua ib qho etchant rau etching silicon thiab lwm yam ntaub ntawv.

Nitrogen fluoride (NF): Siv los txiav cov ntaub ntawv xws li silicon nitride (SiN) thiab aluminium nitride (AlN).

Trifluoromethane (CHF3) thiabtetrafluoromethane (CF4)Siv los txiav cov khoom siv fluoride xws li silicon fluoride thiab aluminium fluoride.

Txawm li cas los xij, cov pa roj uas muaj fluorine muaj qee yam kev phom sij, suav nrog kev lom, kev xeb, thiab kev kub hnyiab.

Kev lom

Qee cov pa roj uas muaj fluorine yog lom, xws li hydrogen fluoride (HF), uas nws cov pa ua rau khaus heev rau daim tawv nqaij thiab txoj hlab pa thiab ua rau tib neeg noj qab haus huv tsis zoo.

Kev xeb

Cov hydrogen fluoride thiab qee cov fluorides muaj zog heev thiab tuaj yeem ua rau puas tsuaj loj heev rau daim tawv nqaij, qhov muag thiab txoj hlab pa.

Kev kub hnyiab

Qee cov tshuaj fluoride yooj yim hlawv thiab ua rau kub hnyiab nrog cov pa oxygen lossis dej hauv huab cua kom tso tawm cov cua sov thiab cov pa lom, uas yuav ua rau muaj hluav taws lossis tawg.

Kev phom sij ntawm kev kub siab

Qee cov pa roj fluorinated tawg tau thaum muaj kev kub siab thiab xav tau kev saib xyuas tshwj xeeb thaum siv thiab khaws cia.

Kev cuam tshuam rau ib puag ncig

Cov pa roj uas muaj fluorine muaj lub neej ntev hauv huab cua thiab GWP tus nqi, uas muaj kev cuam tshuam rau cov txheej ozone hauv huab cua thiab tej zaum yuav ua rau lub ntiaj teb sov thiab ua rau muaj kuab paug rau ib puag ncig.

Kev siv cov roj hauv cov teb tshiab xws li khoom siv hluav taws xob txuas ntxiv mus tob zuj zus, ua rau muaj kev thov tshiab rau cov roj hauv kev lag luam. Raws li qhov muaj peev xwm tsim khoom tshiab ntawm cov khoom siv hluav taws xob loj xws li semiconductors thiab cov vaj huam sib luag hauv Suav teb hauv ob peb xyoos tom ntej no, nrog rau qhov kev thov muaj zog rau kev hloov pauv ntawm cov khoom siv hluav taws xob, kev lag luam roj hauv tsev yuav coj mus rau qhov kev loj hlob siab.