Yog dab tsicarbon tetrafluoride? Siv li cas?
Cov pa roj carbon tetrafluoride, tseem hu ua tetrafluoromethane, suav hais tias yog ib qho inorganic compound. Nws yog siv rau hauv cov txheej txheem plasma etching ntawm ntau yam kev sib xyaw ua ke, thiab kuj siv ua laser roj thiab refrigerant. Nws ruaj khov nyob rau hauv qhov kub thiab txias ib txwm muaj, tab sis nws yog qhov tsim nyog kom tsis txhob kov cov oxidants muaj zog, cov khoom siv hluav taws xob lossis cov khoom siv hluav taws xob. Carbon tetrafluoride yog cov roj uas tsis kub hnyiab. Yog tias nws ntsib cua sov siab, nws yuav ua rau lub siab sab hauv ntawm lub thawv nce ntxiv, thiab muaj kev phom sij ntawm kev tawg thiab tawg. Feem ntau nws tsuas yog tuaj yeem cuam tshuam nrog cov kua ammonia-sodium hlau reagent ntawm chav tsev kub.
Cov pa roj carbon tetrafluorideTam sim no yog cov roj plasma etching loj tshaj plaws siv hauv kev lag luam microelectronics. Nws tuaj yeem siv dav hauv kev etching ntawm silicon, silicon dioxide, phosphosilicate iav thiab lwm yam khoom siv zaj duab xis nyias, ntxuav qhov chaw ntawm cov khoom siv hluav taws xob, kev tsim cov roj teeb hnub ci, kev siv tshuab laser, Kev rwb thaiv tsev Gas, kev txias txias qis, cov neeg sawv cev nrhiav qhov xau, thiab cov tshuaj ntxuav hauv kev tsim cov voj voog luam tawm muaj ntau daim ntawv thov.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-01-2021
