Octafluorocyclobutane (C4F8)

Technical Parameters

Octafluorocyclobutaneyog ib qho tshuaj lom neeg, perfluorinated derivative ntawm cyclobutane, thiab nws cov tshuaj formula yog C4F8. Tsis muaj xim, tsis muaj ntxhiab tsw, tsis-flammable gas. ruaj khov nyob rau hauv qhov thiab tsis muaj tshuaj lom. Nyob rau hauv cov ntaub ntawv ntawm kub kub, lub siab sab hauv ntawm lub thawv yuav nce, thiab yuav muaj kev pheej hmoo ntawm tawg thiab tawg. Cov khoom combustion (decomposition) yog hydrogen fluoride. Octafluorocyclobutane yog qhov ruaj khov heev thiab tsis hnov ​​​​mob nrog lwm yam tshuaj nyob rau hauv ib txwm muaj. Lub thawv ntim khoom thiab cov tshuaj tiv thaiv tuaj yeem ua los ntawm cov hlau cam thiab stainless hlau ntawm 120 ° C, thiab cov hlau tuaj yeem siv tau ntawm 175 ° C. Thaum nws tshaj 400 ° C, Inconel Cov Khoom Siv xws li, npib tsib xee thiab platinum kuj tuaj yeem raug puas tsuaj me ntsis. Ntawm 500 ° C, cov ntaub ntawv no muaj cov nyhuv catalytic rau decomposition. Thaum kub siab (600 ° C), octafluorocyclobutane tuaj yeem decompose rau hauv cov pa roj carbon, carbon tetrafluoride thiab cov tshuaj lom. Octafluorocyclobutane muaj ntau yam kev siv. Nyob rau hauv xyoo tas los no, nws tau dav siv los ua cov tub yees los hloov cov tshuaj tiv thaiv chlorofluorocarbon. Tsis tas li ntawd, nws kuj tau siv dav hauv cov khoom siv hluav taws xob hauv hluav taws xob, cov kuab tshuaj, tshuaj tsuag, cov neeg ua npuas dej, thiab cov khoom siv hluav taws xob loj loj. , Thaum tshav kub kub twj tso kua mis ua hauj lwm kua thiab raw khoom rau zus tau tej cov C2F4 thiab C3F6 monomers. High-purity octafluorocyclobutane (saum toj no 5N) yog siv los ua tus neeg saib xyuas thiab tu tus neeg saib xyuas rau VLSI circuits. Vim nws cov khoom ruaj khov, tsis muaj tshuaj lom, xoom ozone depletion muaj peev xwm (ODP), thiab cov rwb thaiv tsev zoo, octafluorocyclobutane tau siv dav hauv kev lag luam xws li hluav taws xob hluav taws xob rwb thaiv tsev, tu thiab etching, thiab kev kho plasma hauv xyoo tas los no. Cov lus teb thaum muaj xwm txheej kub ntxhov: hnav cov cuab yeej ua pa ntawm tus kheej thiab cov khaub ncaws ua haujlwm. Txiav tawm cov pa roj. Qhov cua thiab convection, dilution thiab diffusion. Txav lub thawv xau mus rau qhov chaw qhib thiab xyuam xim rau qhov cua. Cov thawv ntim tsis tuaj yeem siv tau lawm, thiab yuav tsum tau txais kev kho mob kom tshem tawm cov roj seem.

Daim ntawv thov:

① Kev Lag Luam Khoom Noj:

nws yog tsuas yog siv los ua tus neeg sawv cev tshuaj tsuag hauv kev lag luam zaub mov, tub yees.

② Electronic Kev Lag Luam:

enchant rau integrated circuit, nws kuj siv raws li dielectric sib xyaw nrog sf6, thiab polymerization pab rau fluorinated compound.

Cov pob li qub:

Qhov zoo:

① Ntau tshaj kaum xyoo ntawm kev ua lag luam;

② ISO daim ntawv pov thawj chaw tsim khoom;

③ Kev xa khoom sai;

④ Cov khoom siv ruaj khov;

⑤ On-line tsom xam qhov system rau kev tswj kom zoo hauv txhua kauj ruam;

⑥ Cov kev xav tau siab thiab cov txheej txheem zoo rau kev tuav lub tog raj kheej ua ntej sau;